产品名称：DFC Digital Mass Flow Controller

A Wheatstone bridge design is used to monitor the temperature dependent resistance gradient on the sensor windings which is linearly proportional to the instantaneous rate of flow. The output of the Wheatstone bridge is converted to digital format with a 12 Bit ADC (analog to digital converter).

An on-board microprocessor and nonvolatile memory store all calibration factors and directly control a proportionating electromagnetic valve. The digital closed loop control system continuously compares the mass flow output with the selected flow rate. Deviations from the set point are corrected by compensating valve adjustments, with PID algorithm thus maintaining the desired flow parameters with a high degree of accuracy. Output signals of 0 to 5Vdc or 4 to 20mA are generated indicating mass molecular based flow rates of the metered gas.

Interface:
The digital interface operates via RS485 (optional RS232) and provides access to applicable internal data including FLOW SET POINT, ACTUAL FLOW, ZERO ADJUSTMENTS, and LINEARIZATION TABLE ADJUSTMENTS.

The analog interface provides 0 to 5Vdc, 0 to 10Vdc and 4 to 20 mA inputs and outputs.

Auto Zero:
The DFC automatically nulls the sensor zero offset whenever the flow set point is below 2% of full scale. To accommodate this feature the control valve must fully close under that condition. Provisions are made to either disable, force or store the current auto zero via digital commands.

Totalizer:
The firmware for the DFC provides functions to register total gas quantity. The total mass of gas is calculated by integrating the actual gas flow rate with respect to time.

Digital interface commands are provided to:

• SET the totalizer to ZERO
• START /STOP totalizing the flow
• READ the totalizer
• START the totalizer at a preset flow
• STOP the flow at a preset tota

Multi-Gas Calibration:
The DFC is capable of storing primary calibration data for up to 10 gases. This feature allows the same DFC to be calibrated for multiple gases while maintaining the rated accuracy on each.

Conversion Factors:
Conversion factors for up to 256 gases are stored in the DFC. Conversion factors may be applied to any of the ten gas calibrations via digital interface commands.

Flow Alarms:
High and Low gas flow ALARM limits are programmed using the digital interface. Alarm conditions are reported via the digital interface or can activate the contact closure outputs.

Programmable Flow:
Aalborg software supports programmable flow modes, allowing execution of custom programming of up to ten steps. Various flow configurations include ramping, linearized increasing and decreasing modes.

Auto Tune:
The AUTO TUNE function allows the DFC to automatically optimize control response for the gas under actual process conditions. During the AUTO TUNE process, the instrument adjusts PID gains for optimum step response and determine key control valve characteristics (only available on units with less than 80 L/min maximum flow).

Contact Closure:
Two sets of dry contact relay outputs are provided to actuate user supplied equipment. These are programmable via the digital interface such that the relays can be made to switch when a specified event occurs (e.g. when a low or high flow alarm limit is exceeded or when the totalizer reaches a specified value).

Valve Override:
Means are provided to force the control valve fully open (purge) or fully closed via either the analog or digital interfaces.

Self Diagnostics:
Whenever power is first applied, the DFC runs a series of SELF DIAGNOSTIC TESTS to ensure that it is in optimum working condition.

Engineering Units:
The flow set point, measured gas flow and associated totalizer data is scaled directly in engineering units via digital interface commands.  The following units of measure are supported: % of FS, mL/min, mL/hr, scfm, scfh, sL/min, sL/hr, lbs/hr, lbs/min, and one user defined unit of measure.

Leak Integrity:
1 x 10^-9 smL/sec of Helium maximum to the outside environment.

Balanced Power Supply:
The DFC operates on ±15Vdc. The current requirements for the positive and negative power supplies are balanced such that the current in the power supply common connection is minimized. Maximum power consumption is 13.5 watts at ±15Vdc.

Specification Information

Design Features

• digital and analog modes operate
• programmable flow configurations
• available flow ranges starting from 0 to 10 sccm up to 0 to 100 slpm
• maximum pressure of 500 psig (34.5 bars)
• multi-drop capability of up to 256 units
• stores calibration data for up to 10 gases
• totalizer indicates total gas quantity
• alarm limits for high and low gas flow
• conversion factors for up to 256 gases
• auto tune function for optimum control response
• self diagnostic tests

ACCURACY (including linearity):
15 FC to 25 FC and 10 to 60 psia (0.7-4 bars): ±1% of FS, 0 FC to 50 FC and 5 to 150 psia (0.3-10 bars): ±2% of FS, ±1% of FS at a specific temperature and pressure with special calibration

REPEATABILITY:
±0.15% of full scale

RESPONSE TIME:
0.6 to 1.0 second to within ±2% of set point over 20% to 100% of full scale

TEMPERATURE COEFFICIENT:
0.05% of full scale/ FF or better.

PRESSURE COEFFICIENT:
0.01% of full scale /psi (0.07 bar) or better.

OPTIMUM GAS PRESSURE:
25 psig (1.73 bars).

MAXIMUM GAS PRESSURE:
1000 psig (70 bars).

MAXIMUM DIFFERENTIAL PRESSURE:
50 psig (3.4 bars) for DFC26 and DFC36 40 psig (2.8 bars) for DFC46

MAX PRESSURE DROP:
Refer to Table 11

GAS and AMBIENT TEMP:
41 FF to 122 FF (5 FC to 50 FC)

COMMUNICATION INTERFACE:
RS485 - Standard. RS232 - Optional

OUTPUT SIGNALS:
Linear 0-5 Vdc (2000 ohms min load impedance); impedance); 0-10Vdc (4000 ohms min impedance); 4-20 mA optional (0-500 ohms loop resistance). Maximum noise 20mV peak to peak

CIRCUIT PROTECTION:
Circuit boards have built-in polarity reversal protection. Resettable fuses provide power input protection.

**MATERIALS IN FLUID CONTACT:
316 stainless steel, 416 stainless steel, Viton7 O-rings. Optional O-rings: Buna, EPR and Kalrez7

ATTITUDE SENSITIVITY:
No greater than +15 degree rotation from horizontal to vertical; standard calibration is in horizontal position

CONNECTIONS:
Model DFC26 standard 1/4” compression fittings, Model DFC36 standard 1/4” compression fittings, Model DFC46: standard 3/8” compression fittings, Optional 1/8” or 3/8” compression fittings and 1/4” VCR7 fittings available

LEAK INTEGRITY:
1 x 10-9 smL/sec of helium maximum to the outside environment

TRANSDUCER INPUT POWER:
+15Vdc, 450 mA maximum.

CALIBRATION OPTIONS:
Standard 10 point NIST calibration. Optional up to 9 additional 10 point calibrations may be ordered for an additional charge.

CE COMPLIANCE:
EN 55011 class 1, class B; EN50082-1.

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